Usoro maka ịkwadebe polysilicon.

1. Na-ebu

Debe ihe mkpuchi quartz mkpuchi na tebụl mgbanwe okpomọkụ, tinye silicon raw material, wee wụnye ngwá ọrụ ọkụ, ihe mkpuchi mkpuchi na mkpuchi ọkụ, wepụ ọkụ ahụ iji belata nrụgide n'ime ọkụ na 0.05-0.1mbar ma nọgide na-ekpo ọkụ. Webata argon dị ka gas na-echebe iji mee ka nrụgide dị n'ọkụ na-agbanye isi na gburugburu 400-600mbar.

2. kpo oku

Jiri igwe na-ekpo ọkụ graphite na-ekpo ọkụ ahụ ọkụ, buru ụzọ wepụ mmiri dị n'elu akụkụ graphite, mkpuchi mkpuchi, ihe ndị dị na silicon, wdg, wee jiri nwayọọ nwayọọ kpoo ọkụ iji mee ka okpomọkụ nke quartz crucible ruru ihe dịka 1200-1300.℃. Usoro a na-ewe 4-5h.

3. Na-agbaze

Webata argon dị ka gas na-echebe iji mee ka nrụgide dị n'ọkụ na-agbanye isi na gburugburu 400-600mbar. Jiri nwayọọ nwayọọ mụbaa ike kpo oku iji mee ka ọnọdụ okpomọkụ dị na crucible ruo ihe dịka 1500℃, na akụrụngwa silicon amalite ịgbaze. Debe ihe dịka 1500℃n'oge usoro ịgbaze ruo mgbe agbazechara. Usoro a na-ewe ihe dị ka awa 20-22.

4. kristal ibu

Mgbe agbazechara ihe ndị dị na silicon, ike kpo oku na-ebelata iji mee ka okpomọkụ nke crucible daa n'ihe dịka 1420-1440.℃, nke bụ isi ihe na-agbaze nke silicon. Mgbe ahụ, quartz crucible ji nwayọọ nwayọọ na-agbada ala, ma ọ bụ ngwaọrụ mkpuchi ahụ ji nwayọọ nwayọọ na-ebili, nke mere na quartz crucible ji nwayọọ nwayọọ na-ahapụ mpaghara kpo oku wee mee mgbanwe okpomọkụ na gburugburu; n'otu oge ahụ, mmiri na-agafe na efere dị jụụ iji belata okpomọkụ nke gbazee site na ala, na silicon crystalline na-ebu ụzọ mepụta na ala. N'oge usoro uto, ihe omimi mmiri siri ike na-anọgide na-adị ka ụgbọ elu kwụ ọtọ ruo mgbe kristal gwụchara. Usoro a na-ewe ihe dị ka awa 20-22.

5. Annealing

Mgbe kristal ahụ gwụchara, n'ihi nnukwu gradient dị n'etiti ala na elu nke kristal, nrụgide okpomọkụ nwere ike ịdị na ingot, nke dị mfe ịgbaji ọzọ n'oge kpo oku nke silicon wafer na nkwadebe nke batrị. . Ya mere, mgbe uto kristal gwụchara, a na-edobe silicon ingot nso ebe mgbaze maka awa 2-4 iji mee ka okpomọkụ nke silicon ingot edo ma belata nrụgide okpomọkụ.

6. Ịjụ oyi

Mgbe a na-ekpochapụ silicon ingot n'ime ọkụ ahụ, gbanyụọ ọkụ ọkụ, welie ngwaọrụ mkpuchi okpomọkụ ma ọ bụ belata kpamkpam silicon ingot, ma webata nnukwu ikuku argon n'ime ọkụ ahụ iji jiri nwayọọ nwayọọ belata okpomọkụ nke silicon ingot nso. ọnụ ụlọ okpomọkụ; n'otu oge ahụ, nrụgide gas na ọkụ ọkụ na-eji nwayọọ nwayọọ na-ebili ruo mgbe ọ ruru ikuku ikuku. Usoro a na-ewe ihe dị ka awa 10.